Wafer Resizing / Ntug Rounding

Wafer Resizing / Coring txheej txheem

Cov txheej txheem uas txiav loj dua - kab txaij wafers rau hauv me me - wafers loj, feem ntau yog siv rau qhov tshwj xeeb qhov yuav tsum tau muaj, qauv npaj, los yog tsawg- ntim ntau lawm.
 

Ntug Rounding / Beveling txheej txheem

Ib txheej txheem uas grinds thiab polishes wafer npoo kom tshem tawm chipping thiab microcracks generated thaum lub sij hawm dicing, yog li txhim kho cov neeg kho tshuab zog ntawm wafers. Nws yog feem ntau ua raws li cov kauj ruam tom ntej rau cov txheej txheem wafer resizing.

SiBranch muaj qhov tseeb thiab muaj txiaj ntsig zoo ntawm silicon (Si) thiab silicon ntawm insulator (SOI) wafer resizing cov kev pabcuam. wafer resizing, kuj feem ntau hu ua wafer coring, downsizing, txiav -down, los yog txo qhov loj me, cuam tshuam nrog kev txiav cov wafers loj dua rau hauv cov kab me me thaum tswj xyuas qhov ntev ntev. Peb lees txais kev txiav txim los ntawm ib tus qauv wafers mus rau siab - ntim ntau ntau pua ntawm wafers ib hlis.
Raws li ib feem ntawm peb cov txheej txheem resizing, peb kuj muab precision ntug rounding (ntug beveling) cov kev pab cuam tshem tawm ntug chipping, microcracks, thiab kev ntxhov siab concentrations, ho txhim kho wafer mechanical zog thiab ua yield.
Peb niaj hnub ua wafers nyob rau hauv tag nrho cov qauv diameters: 2 "(50 mm), 3" (75 mm), 4 "(100 mm), 5" (125 mm), 6" (150 mm), 8 "(200 mm), thiab 12" (300 mm), nrog rau kev cai ntau thiab tsawg muaj raws li qhov kev thov.

Muaj peev xwm

Cov hauv qab no yog peb wafer resizing peev xwm:

Txheej txheem wafer txoj kab uas hla mus txog 300mm

Cov txheej txheem wafers nyias li 0.150mm

Ua tiav tiav resized wafers nyob qhov twg los ntawm 50mm mus rau 200mm

Ua ntau yam wafers los ntawm ib qho wafer. Piv txwv li, peb tuaj yeem tsim ob 100mm wafers los ntawm ib qho 200mm wafer.

Ua SEMI- tus qauv tiaj tus +/- 0.002 degrees

Tsim SEMI-tus qauv thais hauv cov wafers

Tolerance ntawm +/- 0.100mm ntawm OD dimension

Kev kam rau siab ntawm +/- 0.050mm ntawm qhov chaw nruab nrab

Offset lub wafer center kom maximize qhov tuag yield

Laser sau tus wafer ID ntawm lub wafer resized rau wafer tus kheej tswj

Wafer ntug rounding / beveling

High -purity deionized (DI) dej sib tsoo cov dej txias

Txiav, nyias, los yog kauj ruam ntug ntawm resized wafers

Dice tiav tuag los ntawm cov seem ntawm thawj wafer