Dab tsi yog cov txheej txheem ntawm silicon wafer tu?

Muaj ob txoj hauv kev los tshem tawm cov kab mob ntawm silicon wafers: kev ntxuav lub cev thiab tshuaj ntxuav.
1. Kev tu tshuaj yog tshem tawm qhov tsis pom kev ua qias tuaj ntawm atoms thiab ions. Muaj ntau txoj hauv kev, xws li hnyav extraction, pickling (sulfuric acid, nitric acid, aqua regia, ntau cov kua qaub sib xyaw, thiab lwm yam) thiab plasma method. Ntawm lawv, hydrogen peroxide system tu txoj kev muaj txiaj ntsig zoo thiab muaj kuab paug ib puag ncig me ntsis. Txoj kev dav dav yog ntxuav cov silicon wafer nrog cov kua qaub nrog qhov sib piv ntawm H2SO4: H2O2=5: 1 lossis 4: 1. Cov khoom muaj zog oxidizing ntawm cov tshuaj ntxuav tuaj yeem decompose thiab tshem tawm cov organic teeb meem; Tom qab ntxuav nrog dej ultrapure, siv cov alkali nrog qhov sib piv ntawm H2O: H2O2: NH4OH=5: 2: 1 lossis 5: 1: 1 lossis 7: 2: 1 Vim yog oxidation ntawm H2O2 thiab complexation ntawm NH4OH, ntau cov hlau ions tsim ruaj khov soluble complexes thiab yaj hauv dej; Tom qab ntawd siv qhov sib xyaw ua ke ntawm H2O: H2O2: HCL=7: 2: 1 lossis 5 : 2: 1 acidic tshuaj ntxuav, vim yog oxidation ntawm H2O2, kev sib cais ntawm hydrochloric acid, thiab complexation ntawm chloride ions, ntau cov hlau tsim cov ions nyuaj uas soluble hauv dej, kom ua tiav lub hom phiaj ntawm kev ntxuav.
Radiotracer atomic tsom xam thiab huab hwm coj spectrometry tsom xam pom tias hydrogen peroxide system muaj qhov zoo tshaj plaws ntxuav cov nyhuv ntawm silicon wafers, thiab nyob rau tib lub sij hawm tag nrho cov tshuaj reagents H2O2, NH4OH thiab HCl siv yuav volatilized kiag li. Thaum ntxuav cov silicon wafer nrog H2SO4 thiab H2O2, txog 2 × 1010 atoms ib square centimeter ntawm sulfur atoms yuav raug tso rau saum npoo ntawm silicon wafer, uas tuaj yeem raug tshem tawm tag nrho los ntawm cov kua qaub tom kawg. Kev ntxuav cov silicon wafer nrog H2O2 system tsis muaj qhov seem, tsis tshua muaj kev phom sij, thiab tseem muaj txiaj ntsig zoo rau kev noj qab haus huv ntawm cov neeg ua haujlwm thiab kev tiv thaiv ib puag ncig. Tom qab cov silicon wafer tau ntxuav nrog tshuaj ntxuav hauv txhua kauj ruam, nws yuav tsum tau muab yaug nrog dej ultrapure.
2. Muaj peb txoj kev ntxuav lub cev.
(1) txhuam los yog txhuam: nws tuaj yeem tshem tawm cov kab mob sib kis thiab feem ntau ntawm cov zaj duab xis lo rau ntawm daim ntawv.
(2) Kev tu siab siab: qhov saum npoo ntawm daim ntawv yog txau nrog cov kua, thiab lub siab ntawm lub nozzle yog siab li ntau pua cua. Kev tu siab siab tso siab rau kev txau, thiab zaj duab xis tsis yooj yim rau khawb thiab puas. Txawm li cas los xij, kev siv tshuaj tua kab mob siab yuav tsim hluav taws xob zoo li qub, uas tuaj yeem zam tau los ntawm kev kho qhov kev ncua deb thiab lub kaum sab xis ntawm lub nozzle mus rau zaj duab xis lossis ntxiv cov tshuaj tiv thaiv kab mob.
(3) Ultrasonic tu: Ultrasonic suab zog yog nkag mus rau hauv cov tshuaj, thiab cov pa phem ntawm cov zaj duab xis yog ntxuav tawm los ntawm cavitation. Txawm li cas los xij, nws yog qhov nyuaj dua kom tshem tawm cov khoom me dua 1 micron los ntawm cov ntawv ua qauv. Ua kom cov zaus mus rau ultra-high zaus band, thiab cov nyhuv tu zoo dua.