Basic Introduction Ntawm SOI Silicon Wafer

Lub tuam txhab tuaj yeem muab cov neeg siv khoom nrog ntau yam kev qhia tshwj xeeb thiab zoo SOI silicon wafers (Silicon On Insulator-Silicon On Insulator), uas tsim nyog rau cov neeg siv khoom hauv ntau daim ntawv thov suav nrog MEMS, cov khoom siv hluav taws xob, lub siab sensors thiab CMOS integrated circuit manufacturing. SOI wafers muab cov kev daws teeb meem zoo rau cov cuab yeej siv hluav taws xob thiab cov khoom siv hluav taws xob tsawg, thiab tau suav hais tias yog cov kev daws teeb meem tshiab rau cov khoom siv hluav taws xob siab thiab RF. Lub SOI wafer yog ib qho nyuaj-zoo li cov sandwich nrog peb txheej; suav nrog txheej txheej saum toj kawg nkaus (txheej txheem txheej), nruab nrab faus oxide txheej (cov txheej txheem SiO2) thiab hauv qab substrate (silicon ntau). SOI wafers yog tsim los ntawm kev siv SIMOX txoj kev thiab wafer bonding tshuab, kom cov txheej txheem txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheej txheem SIMOX wafer thiab wafer bonding tshuab, thiab cov txheej txheem SIMOX wafer yog tsim los siv cov txheej txheem SIMOX thiab wafer bonding tshuab.