1. Substrate
1. Kev txhais thiab ua haujlwm
Kev Txhawb Nqa Lub Cev: lub substrate yog cov cab kuj ntawm cov ntaus ntawv semiconductor, feem ntau yog ib puag ncig lossis xws li ib qho silicon wafer).
· Sickstal template: muab ib tus qauv ua qauv rau cov txheej txheem kev cai lij choj ua kom ntseeg tau tias yog cov qauv crystal crystal (homoepitaxial) lossis ntais ntawv (heteronitaxial).
Tog hluavtaws hluav taws xob: ib feem ntawm lub substrate nrog rau cov khoom siv uas muaj roj (xws li insulator fais fab tuag), xws li sapphire substrate).
2. Sib piv ntawm Mainstream Substrate Cov Ntaub Ntawv
|
Ntaub ntawv |
Nta |
Cov Kev Siv Raug Raug |
|
Silicon (si) |
Tus nqi qis, paub tab Technology, Nruab Nrab Thermal Conductivity |
Kev sib xyaw ua ke, mosfet, igbt |
|
Sapphire (Al₂o₃) |
Rwb thaiv tsev, kev kub siab kuj, loj lattice tsis sib xws (txog li 13% nrog gan) |
GAN-based LEDs, RF li |
|
Silicon Carbide (Sic) |
Siab thermal conductivity, siab sib zog hloov lub zog, muaj kub tsis kam |
Lub Tsheb Hluav Taws Xob Lub Tsheb Hluav Taws Xob, 5G Hauv Puag Chaw Nres Tsheb RF li |
|
Gallium arsenide (gaas) |
Cov yam ntxwv zoo heev zaus, kev sib tw ncaj qha |
RF chips, laser diodes, hnub ci hlwb |
|
Gymium nitride (GAN) |
Kev Muaj Hluav Taws Xob Muaj Peev Xwm Hluav Taws Xob, Cov Hluav Taws Xob Loj |
CEEV CEEV them adapter, millimeter txaus kev sib txuas lus kev sib txuas lus ntxiv |
3. Cov kev txiav txim siab tseem ceeb rau kev xaiv substrate
· Lattice sib phim: txo cov txheej txheem epitaxial tsis xws luag (piv txwv li gan \/ sapphire lattice mispatch txog 13%, xav tau ib txheej ntas yeej).
· Cua sov nthuav dav coeffanic txuam: zam kev ntxhov siab tawg los ntawm qhov kub hloov.
· Nqi thiab txheej txheem sib xws: piv txwv li, silicon substrates dominate ntawm cov ntsiab lus vim muaj cov txheej txheem paub tab.
2. Epitaxial txheej
1. Kev txhais thiab lub hom phiaj
Kev loj hlob tuaj yeem: Deposition Kev Loj Hlob: Deposition ntawm ib qho Crystal nyias zaj duab xis ntawm kev ua yeeb yaj kiab los ntawm kev siv tshuaj lossis lub cev ua kom nruj nrog cov txheej txheem.
Core Functions:
- Txhim kho cov khoom siv purity (lub substrate yuav muaj impurities).
- Tsim cov qauv heterogeneous (xws li Gaas \/ Algaas Quantum Wells).
- Sib cais ua ntu zus-xws li micropipe discurrs ntawm sic substrates).
2. Kev faib tawm ntawm cov thev naus laus zis Epitaxial
|
Tej txuj ci tshiab |
Lub ntsiab lus |
Nta |
Siv tau cov ntaub ntawv |
|
Mocvd |
Hlau Orgine So + Roj Ntses (xws li TMGA + NH₃ los tsim GAN) |
Haum rau compound semiconductors, ntau lawm ntau lawm |
Gan, Gaas, Inp |
|
Mbe |
Molecular nqaj txheej-los ntawm txheej tso nyiaj hauv qab ultra-siab nqus |
Atomic-qib tswj, qeeb txoj kev loj hlob, tus nqi siab |
Superlattice, Quantum dots |
|
Lpcvd |
Thermal Decomposition ntawm Silicon Cov Roj Roj (xws li Sih₄) nyob rau hauv qis siab |
Mainstream Silicon Epitaxy Technology, Zoo Sib Xws |
Si, Sige |
|
HVPE |
Kev kub siab kub vapor theem epitaxy |
Kev loj hlob sai, haum rau tuab zaj duab xis (xws li gan substrates) |
Gan, Zno |
3. Cov ntsiab lus tseem ceeb ntawm cov txheej txheem epitaxial tsim
- Thickness: los ntawm ob peb nanometers (Quantum zoo) mus rau kaum ntawm microns (epilayer ntawm cov khoom siv fais fab).
- Doping: meej tswj cov cab kuj los ntawm doping impurities xws li phosphorus (n-hom) thiab boron (p-hom).
- Interface Zoo: Latice Mismatch yuav tsum tau ua kom muaj kev cuam tshuam los ntawm cov txheej ntawm cov txheej txheem (xws li Gan \/ aln) lossis strained superlattice.
4. Cov teeb meem thiab kev daws teeb meem ntawm HeterOepitaxial kev loj hlob
- Lattice mismatch:
- Gradient Buffer Txheej: maj mam hloov cov muaj pes tsawg leeg los ntawm substrate rau cov txheej epitaxial txheej (xws li alan gregient txheej).
- Tsawg-kub cov nucleatation txheej: txheej nyias txheej ntawm qhov kub tsawg los txo kev ntxhov siab (xws li qis qis aln nucleation txheej ntawm gan).
- Thermal mismatch: Xaiv cov ntaub ntawv ntawm cov ntaub ntawv nrog cov hluav taws xob zoo sib xws ntawm cov coeffalients, lossis siv cov qauv hloov pauv hloov tau.
3. Cov ntaub ntawv synergistic ntawm cov substrate thiab epitaxy
Rooj plaub 1: Gan raws li coj
Substrate: Sapphire (tus nqi qis, rwb thaiv tsev).
Cov qauv kev lag luam epitaxial:
- Cov txheej txheej ntas (aln lossis tsawg-kub gan) → txo lattice tsis xws luag.
- N-hom GAN txheej → muab hluav taws xob.
- Ingan \/ Gan Multua-Quantum zoo → Lub teeb-qhib txheej.
- P-hom GAN txheej → muab qhov.
Qhov tshwm sim: qhov ntom ntom ntom yog li 10⁸ cm⁻², thiab luminous efficiency yog kev txhim kho.
Rooj plaub 2: SIC Lub Hwj Chim Mosfet
Substrate: 4H-SIC tib lub Crystal (tsis muaj kev txheeb ze mus txog 10 kV).
Epitaxial txheej:
- N-hom sic drift txheej (tuab 10-100 μm) → Withstand Live.
- P-hom SIC cheeb tsam cheeb tsam → tswj channel tsim.
Cov txiaj ntsig: 90% qis dua ntawm-tiv taus ntau dua li silicon pab kiag li lawm, 5 zaug nrawm dua hloov hloov.
Rooj plaub 3: Silicon-based Gan RF li
Substrate: High-resistance silicon (tus nqi qis, yooj yim rau kev sib sau).
Epitaxial txheej:
- Aln Nucleation txheej → undeviates lub latsis tsis muaj suab paj nruas ntawm si thiab Gan (16%).
- Gan Buffer Txheej → capretctures tej yam tsis xws luag thiab tiv thaiv lawv los ntawm kev ncua deb ntawm cov khoom nquag.
- Ogan \/ gan heteroJunittions → ua kom muaj hluav taws xob siab channel (hemt).
Daim Ntawv Thov: 5G Chaw nres tsheb nres tsheb hluav taws xob lub zog amplifier, nrog ntau zaus ntawm ntau dua 28 GHz.