Hauv qab-qhov rooj nyias-zaj duab xis transistors (TFTs) yog ib qho tseem ceeb ntawm cov khoom siv hluav taws xob niaj hnub no. Cov qauv TFT muaj cov txheej txheem semiconductor, qhov chaw thiab cov dej ntws tawm, thiab lub rooj vag electrode. Lub rooj vag electrode txuas nrog kev tswj xyuas hluav taws xob thiab ua haujlwm raws li qhov hloov ntawm transistor.
Lub rooj vag electrode yog cais los ntawm semiconductor txheej los ntawm ib txheej insulating, hu ua dielectric txheej los yog lub rooj vag insulator. Lub dielectric txheej yog qhov tseem ceeb hauv kev txiav txim siab qhov ua tau zoo ntawm transistor los ntawm kev tswj lub zog ntawm cov hluav taws xob hluav taws xob tsim los ntawm lub rooj vag voltage. Kev xaiv cov khoom siv rau cov txheej txheej dielectric ua lub luag haujlwm tseem ceeb hauv kev tsim cov TFT ua haujlwm siab, vim nws cuam tshuam rau lub cuab yeej hluav taws xob ruaj khov, kev them nqi thauj khoom, thiab kev hloov ceev.
Cov khoom siv dielectric feem ntau siv rau hauv qab-qhov rooj TFTs yog silicon dioxide (SiO2), silicon nitride (Si3N4), thiab txhuas oxide (Al2O3). Txhua yam ntawm cov ntaub ntawv no muaj lawv cov khoom tshwj xeeb thiab qhov zoo. Piv txwv li, SiO2 muab kev ua tau zoo ntawm hluav taws xob zoo thiab thermal stability, Si3N4 muaj qhov siab tawg voltage thiab txhua yam muaj zog, thaum Al2O3 muab lub siab dielectric tas li thiab siab thermal stability.
Hauv kev xaus, lub rooj vag electrode thiab dielectric txheej yog ib qho tseem ceeb ntawm lub rooj vag TFTs. Ib txheej txheej dielectric tsim tau zoo uas ua tau raws li qhov xav tau ntawm cov cuab yeej ua haujlwm yog qhov tseem ceeb hauv kev ua tiav TFTs ua haujlwm siab. Nrog rau kev tshawb nrhiav thiab kev txhim kho txuas ntxiv, TFTs hauv qab-qhov rooj yuav txuas ntxiv pab txhawb rau kev nce qib ntawm cov khoom siv hluav taws xob niaj hnub no.