Impurity doping yog ib kauj ruam tseem ceeb heev hauv chip tsim. Yuav luag txhua txoj kev sib xyaw ua ke, coj, hluav taws xob pab pawg, thiab lwm yam. Xav tau doping. Yog li vim li cas doping? Cov hau kev doping yog dab tsi? Lub luag haujlwm ntawm doping?
Vim li cas doping?
Intrinsic silicon muaj kev ua tsis zoo. Nws yog ib qho tsim nyog los qhia me me ntawm impurities rau intrinsic cov khoom siv hluav taws xob lossis cov qhov hluav taws xob kom ua kom cov qauv kev tsim khoom.
Dab tsi yog intrinsic silicon?
Intrinsic silicon hais txog silicon, silicon uas tsis doped nrog ib qho impurities, thiab nws cov xov tooj ntawm hluav taws xob dawb thiab qhov sib npaug. Intrinsic silicon yog cov khoom siv uas muaj cov khoom siv uas tsis zoo ntawm chav sov.
Dab tsi yog n-hom silicon?
N-hom silicon yog tsim los ntawm doping ntshiab silicon nrog pentavalent ntsiab (xws li p, li, thiab lwm yam). Atoms ntawm Pantavalent cov ntsiab xws li phosphorus thiab arsenic hloov txoj haujlwm ntawm Silicon atoms. Vim tias silicon yog 4- Valent, yuav muaj ib qho hluav taws xob ntxiv. Lub tshuab hluav taws xob ntxiv tuaj yeem txav mus dawb thiab nqa tus nqi tsis zoo. N txhais tau tias tsis zoo.
N +: huab hluav taws n-hom sandiconductor. N-: maj mam doped n-hom sandiconductor.
P-hom silicon yog dab tsi?
P-hom Silicon yog tsim los ntawm doping ntshiab silicon nrog cov khoom siv txij nkawm (xws li B, GA, thiab lwm yam). Atoms ntawm cov tsev so xws li boron thiab gallium hloov txoj haujlwm ntawm silicon atoms, tab sis piv nrog silicon atoms, nws tsis muaj hluav taws xob. Ib lub qhov tshwm nyob rau hauv txoj hauj lwm uas lub electron ploj lawm. Lub qhov nws tus kheej muaj tus nqi zoo thiab tuaj yeem lees txais cov tshuab hluav taws xob, yog li nws yog hu ua P-hom Silicon. P sawv rau qhov zoo.
P +, uas txhais tau tias yog ib qho doped heev p-hom slicationonductor nrog lub siab siab. P-, uas txhais tau tias yog P-hom sliconductor nrog qhov qis doping conventration.
Hom Pantavalent Ntsiab
Pentavalent ntsiab yog pawg VA cov ntsiab hauv lub rooj ntu, sawv cev los ntawm p thiab ib yam. Cov ob qho no muaj 5 lub tshuab hluav taws xob hauv txheej sab nraud, 4 ntawm cov tuaj yeem tsim cov kev sib tsoo nrog silicon atoms nrog siters, thiab qhov seem yog ib qho yog hluav taws xob pub dawb.
Phosphorus (p) yog ib qho tsis yog xim hlau nrog ntau cov ponstropes, feem ntau ntawm cov phosphorus, cov phosphorus liab thiab dub. Arsenic (raws li) yog metalloid keeb nrog nws yog xim hlau lus thiab tshuaj lom neeg zoo sib xws, tab sis arsenic cov tebchaw feem ntau yog qhov ruaj khov dua. Arsenic trioxide yog arsenic oxide, as2o3.
Koom Haum Cov Chaw Haujlwm Sib Koom Tes
Cov ntsiab lus sib tw yog cov pab pawg IIia cov khoom nyob rau hauv lub rooj ntu, sawv cev los ntawm Boron (B) thiab Gallium. Ob yam no muaj 3 lub tshuab hluav taws xob hauv txheej sab nraud.
- Boron (B) yog ib qho nyuaj thiab brittle tsis yog xim hlau nrog cov xim dub lossis xim av. Nyob rau hauv qhov, nws feem ntau tshwm sim nyob rau hauv daim ntawv ntawm nws cov oxides lossis borates, thiab cov tshuaj uas muaj xws li boric acid, boron, thiab lwm yam.
- Gallium (GA) yog cov hlau muag uas muaj lub siab me me. Nws melting point yog hais txog 29.76 degree, thiab Gaas tau siv dav siv ua cov khoom siv semiconductor. Tsis tas li ntawd, gallium tseem siv rau hauv kev tsim khoom ntawm cov yeeb yaj kiab hnub ci, coj, thiab lwm yam.
Ntau hom kev doping
Tam sim no muaj ob txoj kev tseem ceeb, uas yog diffusion thiab ion im tsiantication:
- Kev sib txawv
Ua ntej, Semiconductor Wafer yog ntxuav kom ntseeg tau tias tsis muaj kev paug rau ntawm nws sab. Tom qab, cov wafic wafer yog rhuab ntawm cov kub kub (diffusion rauv). Dopant atoms tuaj yeem nkag mus rau hauv cov khoom siv semiconductor, thiab tom qab diffusionoror, tom qab tshaj tawm xws li kev faib tawm ntawm dopants.
- Ion Cog Rau
Ion imgantation siv ntau voltage kom ua nrawm ionized dopants kom muaj kev kub ceev, thiab cov kev nrawm nrawm rau ntawm qhov chaw ntawm cov khoom cua silicon. Vim tias cov ions muaj lub zog zoo dua, lawv yuav nkag mus rau saum npoo ntawm silicon wafer thiab nkag mus rau sab hauv.