❶ Nqe lus nug: Dab tsi yog qhov siab tshaj plaws ua haujlwm kub rau semiconductor -qib polished silicon wafers?
Teb hauv ob qhov xwm txheej:
|
Scenario |
Qhov kub thiab txias |
Kev piav qhia |
|
Kev tsim khoom |
Txog li 1200 degree |
Cov txheej txheem xws li oxidation, diffusion, thiab annealing yog ua thaum kub kub. Lub melting point ntawm ib leeg silicon yog 1414 degree, thiab nws yog kiag li ruaj khov hauv qab 1200 degree. |
|
Kev Ua Haujlwm Ua Haujlwm tiav |
Feem ntau tsis tshaj 175 degree |
Kev lag luam qib 0-70 degree, qib kev lag luam -40 ~ 85 degree, qib tsheb / tub rog mus txog 150 ~ 175 degree |
❷ Lo lus nug: Vim li cas qhov kev khiav hauj lwm kub ntawm cov khoom tiav lawm qis dua qhov ua haujlwm kub?
Peb lub laj thawj tseem ceeb:
1.Kev laus ntawm ntau yam ntaub ntawv
Lub nti tsis yog ua los ntawm silicon xwb, nws tseem muaj cov hlau sib txuas (tooj liab / aluminium), insulating dielectrics, thiab cov khoom ntim. Kub kub ceev ceev:
- Electromigration ntawm hlau, ua rau hlau tawg
- Kev laus ntawm insulating dielectrics, nce to tam sim no
- Softening thiab tsis ua hauj lwm ntawm cov khoom ntim
2.Drift ntawm cov yam ntxwv hluav taws xob
Cov khoom siv semiconductor tsis tshua muaj siab rau qhov kub thiab txias:
- Qhov pib voltage drift, qhov chaw khiav hauj lwm deviates los ntawm kev tsim
- Txo hauv cov cab kuj, txo kev ua haujlwm
- Exponential nce nyob rau hauv to tam sim no, uncontrolled zog noj
- Lub sijhawm tsis ua haujlwm, kev ua haujlwm tsis ua haujlwm hauv Circuit Court
3.Kev siv hluav taws xob thiab kev ntseeg tau
Raws li txoj cai Arrhenius,rau txhua txhua 10℃qhov kub thiab txias, qhov tsis ua hauj lwm tus nqi kwv yees li ob npaug. Cov chips niaj hnub twb muaj kev siv hluav taws xob siab, thiab thaum ua ke nrog siab - qhov chaw kub, qhov cua kub dissipation yuav nyuaj, ua rau muaj kev txo qis hauv kev ua neej.
❸ Lo lus nug: Puas muaj kev sib raug zoo ntawm silicon wafer thickness thiab kub tsis kam?
Kev sib raug zoo tsawg heev:
- Rau cov khoom tiav kev khiav hauj lwm kub txwv: Yuav luag tsis cuam tshuam. Qhov ntsuas kub ntawm kev ua haujlwm yog los ntawm kev ntim khoom, kev sib txuas ntawm cov hlau, thiab cov cuab yeej tsim, thiab tsis tshua muaj kev cuam tshuam rau silicon wafer thickness.
- tuab silicon wafers yeej muaj me ntsis zoo dua tshav kub dissipation. Cov txheej txheem Advanced feem ntau ua backside thinning (hauv av kom qis dua 100μm) los txhim kho cov cua sov, tsis yog vim cov tuab wafers tsis muaj qhov kub thiab txias.
- Rau cov txheej txheem tsim khoom: tuab silicon wafers muaj peev xwm ua kom sov ntau dua, cua sov qeeb thiab txias, tab sis tsuas yog yuav tsum tau kho cov txheej txheem sij hawm them nyiaj. Nws tsis cuam tshuam rau qhov kub thiab txias, thiab tuab silicon wafers tseem tuaj yeem tiv taus 1200℃siab kub.
Xaus: Silicon wafer thickness feem ntau cuam tshuam rau txhua yam muaj zog, tshav kub dissipation, thiab ntim, nws tsis cuam tshuam rau qhov ntsuas kub tsis kam.
Summary of Key Knowledge Points
- Silicon nws tus kheej yog kub heev resistant, 1200℃txheej txheem kub yog lub sab sauv txwv, nrog tseem 200℃npoo hauv qab lub melting point.
- Dab tsi txwv qhov kev ua haujlwm kub ntawm cov khoom tiav tsis yog silicon nws tus kheej, tab sis lwm yam khoom siv sab nraud silicon thiab cov yam ntxwv hluav taws xob ntawm lub cuab yeej.
- Thickness tsis cuam tshuam rau qhov kub thiab txias, nws tsuas yog cuam tshuam rau cov cua sov dissipation thiab kev siv tshuab.
- Kub yog tus naj npawb ib tus neeg tua neeg ntawm cov khoom siv hluav taws xob semiconductor kev ntseeg tau, thiab tsim kev khiav hauj lwm kub yog teem los xyuas kom meej lifespan thiab stability.