Micro-nano Processing Technology: Qhuav Etching Thiab ntub Etching

Nyob rau hauv cov txheej txheem ntawm micro-nano ua, etching yog ib kauj ruam tseem ceeb tom qab photolithography, uas yog xaiv tshem tawm cov ntaub ntawv tsis tsim nyog etching los ntawm qhov chaw ntawm silicon wafers los ntawm cov tshuaj los yog lub cev txoj kev, thiab tom qab ntawd tsim cov qauv Circuit Court txhais los ntawm photolithography. Hauv lwm lo lus, khaws qhov koj xav tau thiab tshem tawm yam koj tsis xav tau. Cov txheej txheem etching hauv micro-nano ua tshuab tam sim no feem ntau muab faib ua ob txoj kev etching: qhuav etching thiab ntub etching.
Kev ntub dej etching yog ib txoj hauv kev ntawm kev tshem tawm cov tshuaj etched los ntawm cov tshuaj tiv thaiv ntawm cov tshuaj etching thiab cov tshuaj etched. Muaj zog adaptability, zoo nto uniformity, tsis tshua muaj kev puas tsuaj rau silicon wafers, haum rau yuav luag tag nrho cov hlau, iav, yas thiab lwm yam ntaub ntawv. Txawm li cas los xij, vim nws cov kev txwv nyob rau hauv kab dav tswj thiab etching directionality: feem ntau ntub etching yog isotropic etching uas tsis yooj yim los tswj, cov fidelity nyhuv ntawm cov qauv etching tsis zoo tagnrho, thiab qhov tsis sib xws etching kab dav yog nyuaj. Coj tswj. Qhuav etching tau dhau los ua cov txheej txheem tseem ceeb tam sim no.
Qhuav etching yog kom nthuav tawm qhov chaw ntawm silicon wafer mus rau plasma generated nyob rau hauv lub gaseous xeev. Lub plasma hla lub qhov rais qhib los ntawm photoresist thiab muaj cov tshuaj tiv thaiv lub cev / tshuaj lom neeg nrog silicon wafer, yog li tshem tawm cov khoom siv sab nraud. Piv nrog rau ntub etching, qhov zoo ntawm qhuav etching yog qhov etching profile yog anisotropic thiab muaj peev xwm tswj tau txoj kab dav zoo dua, thiaj li ua kom muaj kev ncaj ncees ntawm cov qauv zoo tom qab hloov. Nyob rau tib lub sijhawm, vim tias tsis muaj tshuaj reagents siv, chemical Pollution nrog rau cov teeb meem xws li cov khoom siv thiab cov nqi kho roj pov tseg. Qhov tsis zoo yog: tus nqi siab.
Qhuav etching feem ntau suav nrog hlau etching, dielectric etching thiab silicon etching, ntawm cov hlau etching yog tsuas yog siv rau txhuas alloy etching ntawm hlau interconnection kab, ua tungsten plugs thiab hu rau hlau etching; dielectric etching yog tsuas yog siv rau kev sib cuag qhov thiab los ntawm qhov; silicon etching feem ntau yog siv los ua cov rooj vag polysilicon hauv MOS lub rooj vag cov qauv thiab cov khoom siv cais tawm lossis ib qho siv lead ua silicon grooves hauv DRAM capacitor qauv.