Nag hmo, ib tug me nyuam kawm ntawv hauv Knowledge Planet nug seb lub silicon wafer nto tsis muaj Bow, Warp, TTV, thiab lwm yam yog dab tsi thiab yuav ua li cas kom paub qhov txawv lawv. Kuv xav tias lo lus nug no yog tus sawv cev heev, yog li kuv tau sau ib tsab xov xwm tshwj xeeb los piav qhia nws.
Wafer deg tsis muaj Bow, Warp, thiab TTV yog qhov tseem ceeb heev uas yuav tsum tau xav txog hauv kev tsim cov chips. Cov kev txwv peb ua ke no qhia txog qhov flatness thiab thickness uniformity ntawm silicon wafer thiab muaj kev cuam tshuam ncaj qha rau ntau cov kauj ruam tseem ceeb hauv cov txheej txheem tsim chip.
Dab tsi yog TTV, Bow, Warp?
TTV (Tag nrho Thickness Variation)
TTV yog qhov txawv ntawm qhov siab tshaj plaws thiab qhov tsawg kawg nkaus thickness ntawm silicon wafer. Qhov no parameter yog ib qho tseem ceeb qhia siv los ntsuas qhov uniformity ntawm silicon wafer thickness. Hauv kev tsim khoom semiconductor, lub thickness ntawm silicon wafer yuav tsum zoo ib yam thoob plaws tag nrho saum npoo. Nws feem ntau yog ntsuas ntawm tsib qhov chaw ntawm silicon wafer thiab qhov sib txawv siab tshaj plaws yog xam. Thaum kawg, tus nqi no yog lub hauv paus rau kev txiav txim siab zoo ntawm silicon wafer. Hauv kev siv cov tswv yim, TTV ntawm 4-inch silicon wafer feem ntau tsawg dua 2um, thiab ntawm 6-inch silicon wafer feem ntau tsawg dua 3um.
Hneev
Bow hais txog qhov curvature ntawm silicon wafer hauv semiconductor manufacturing. Lo lus tuaj yeem los ntawm kev piav qhia ntawm cov duab ntawm ib yam khoom thaum nws khoov, ib yam li cov duab nkhaus ntawm hneev. Tus nqi ntawm Bow yog txhais los ntawm kev ntsuas qhov siab tshaj qhov sib txawv ntawm qhov nruab nrab thiab ntug ntawm silicon wafer. Tus nqi no feem ntau qhia hauv microns (µm). Tus qauv SEMI rau 4-inch silicon wafers yog Bow<40um.
Warp
Warp yog lub ntiaj teb tus yam ntxwv ntawm silicon wafers, qhia qhov siab tshaj qhov sib txawv ntawm silicon wafer nto ntawm lub dav hlau. Nws ntsuas qhov kev ncua deb ntawm silicon wafer qhov siab tshaj plaws thiab qis tshaj ntawm silicon wafer. Tus qauv SEMI rau 4-inch silicon wafers yog Warp <40um.
Dab tsi yog qhov txawv ntawm TTV, Bow, thiab Warp?
TTV tsom ntsoov rau qhov kev hloov ntawm tuab thiab tsis quav ntsej txog hneev lossis twist ntawm wafer.
Hneev tsom mus rau tag nrho hneev nti, feem ntau xav txog lub hneev nruab nrab ntawm qhov chaw taw tes thiab ntug.
Warp yog ntau dua, nrog rau hneev nti thiab twist ntawm tag nrho wafer nto.
Txawm hais tias peb qhov tsis zoo no yog txhua yam cuam tshuam nrog cov duab thiab cov yam ntxwv ntawm cov khoom siv hluav taws xob ntawm silicon wafer, lawv ntsuas thiab piav qhia ntau yam thiab muaj qhov sib txawv ntawm cov txheej txheem semiconductor thiab wafer tuav.
Kev cuam tshuam ntawm TTV, Hneev, thiab Warp ntawm cov txheej txheem semiconductor
Ua ntej tshaj plaws, qhov me me ntawm peb qhov tsis muaj, qhov zoo dua. Qhov loj dua TTV, Hneev, thiab Warp, qhov loj dua qhov cuam tshuam tsis zoo ntawm cov txheej txheem semiconductor. Yog li ntawd, yog hais tias qhov tseem ceeb ntawm peb tshaj li tus qauv, silicon wafer yuav raug muab pov tseg.
Kev cuam tshuam rau cov txheej txheem photolithography:
Qhov tob ntawm kev tsom xam teeb meem: Thaum lub sijhawm photolithography txheej txheem, nws yuav ua rau muaj kev hloov pauv hauv qhov tob ntawm kev tsom xam, cuam tshuam rau tus qauv qhov pom tseeb.
Teeb meem alignment: Nws yuav ua rau lub wafer hloov thaum lub sij hawm kev sib raug zoo, ntxiv cuam tshuam rau kev sib raug zoo ntawm cov khaubncaws sab nraud povtseg.
Kev cuam tshuam rau chemical mechanical polishing:
Polishing tsis sib xws: Nws yuav ua rau polishing tsis sib xws thaum lub sij hawm CMP txheej txheem, ua rau nto roughness thiab residual stress.
Kev cuam tshuam rau nyias zaj duab xis deposition:
Uneven deposition: Concave thiab convex wafers yuav ua rau tsis sib xws ntawm cov yeeb yaj kiab tso tawm thaum lub sij hawm tso tawm.
Kev cuam tshuam rau wafer loading:
Loading teeb meem: Concave thiab convex wafers yuav ua rau wafer puas thaum lub sij hawm tsis siv neeg loading
