Mechanism ntawm Silicon Nitride Zaj Duab Xis Loj Hlob
LPCVD kev loj hlob sib npaug:
Txoj kab zauv rau kev loj hlob Pecvd yog:
Los ntawm ob daim duab saum toj no, peb tuaj yeem pom tias:
Sii4 muab cov SIPE, thiab N2 lossis NH3 muab cov n.
Txawm li cas los xij, vim muaj kev kub siab tshaj plaws ntawm LPCVD, hydrogen atoms feem ntau muab tshem tawm ntawm silicon nitride zaj duab xis, yog li cov ntsiab lus hydrogen hauv cov reactant yog tsawg. Silicon nitride feem ntau yog tsim ntawm silicon thiab nitrogen ntsiab.
Cov tshuaj tiv thaiv kev kub siab yog qhov ntsuas kub tsawg, thiab cov khoom siv hos at the n attracts, ua rau cov tshuaj tiv thaiv hydrees ntau dua, ua rau cov zaj duab xis ua tsis taus.
Vim li cas Pecvd feem ntau siv NH3 los muab cov nitrogen qhov chaw?
NH3 molecules muaj nh ib leeg khi, thaum N2 molecules muaj n≡n triple bonds. N≡n yog ruaj khov dua thiab muaj zog dua lub zog, uas yog, muaj qhov kub siab dua rau cov tshuaj tiv thaiv tshwm sim. Qhov qis NH Txoj Kev Cog Tseg ntawm NH₃ ua rau nws xaiv thawj zaug rau cov txheej txheem ntawm cov txheej txheem ntawm cov txheej txheem tsawg.
