Silicon (si) yog cov khoom siv tseem ceeb hauv kev lag luam semiconduct, thiab nws cov tshuab ua kev ua tau zoo yog qhov tseem ceeb rau kev txhim kho microelectromechhanical systems (MEMS). Nyob rau hauv kev ua ntawm silicon, etching thev naus laus zis yog ib qho ntawm cov kauj ruam tseem ceeb kom ua tiav cov qauv micro-nano. Txawm li cas los xij, qhov etching tus nqi ntawm silicon tsis yog yam tsis zoo, tab sis siab nyob ntawm kev taw qhia ntawm cov siv lead ua (siv lead ua). Qhov kev taw qhia kev sib tw crystal no yog qhov tshwm sim ncaj qha ntawm kev sib txawv hauv kev npaj ceev thiab tshuaj lom neeg atom ntawm cov dav hlau crystal txawv. Kab lus no yuav tham txog kev sib raug zoo ntawm silicon etching thiab cov kev qhia ua lei heev, thiab soj ntsuam nws cov ntaub ntawv siv cov tswv yim hauv micro-nano kev ua haujlwm.
Silicon Crystal qauv thiab Crystal Kev Qhia
Silicon yog lub lead ua nrog lub pob zeb diamond qauv, thiab nws txoj kev tswj atomic qhia qhov sib txawv ntawm cov dav hlau crystal sib txawv. Cov dav hlau siv lead ua xws li (100), (110) thiab (111) cov dav hlau.
(100) Crystal lub dav hlau: qhov atomic automic tau xoob, thiab cov kev sib txuas lus rau kev lom zem yog nthuav tawm.
(110) Crystal dav hlau: lub ntom ntom ntom yog nruab nrab ntawm (100) thiab (111).
(111) Crystal Crystal: Cov atomic kev ua haujlwm yog qhov kev sib xyaw ua ke tshaj plaws, thiab cov kev sib txuas lus tshwj xeeb yog qhov nyuaj rau kev tawm tsam los ntawm Etchant.
Qhov sib txawv ntawm cov qauv atomic ntawm cov dav hlau crystal ncaj qha cuam tshuam nrog tus nqi etching, ua rau kev coj tus cwj pwm ntawm cov dav hlau crystal sib txawv.
Crystal Orient Kev Ncaj Ncees nyob rau hauv ntub dej etching
Ntub etching yog ib qho ntawm cov kev siv cov kev siv ua hauv cov khoom ua si silicon, tshwj xeeb tshaj yog nyob rau hauv anyootropic etching. Feem ntau siv cov etchants suav nrog cov kev daws teeb meem alkaline xws li koh (potassium hydroxide) thiab tmah (tetramethylammide). Cov nqi etching ntawm cov dav hlau crystal sib txawv sib txawv:
(100) lub dav hlau siv lead ua: vim yog cov txheej txheem xoob ntawm atoms, etching tus nqi yog qhov ceev tshaj plaws.
(110) Crystal lub dav hlau: qhov etching tus nqi yog sai dua, tab sis qis dua qis dua li (100) dav hlau.
(111) Crystal lub dav hlau: Vim yog kev sib ze ntawm atoms, etching tus nqi yog qhov qeeb
Piv txwv li, hauv kev daws teeb meem, cov piv txwv piv txwv feem ntau yog (100) :( 111) :( 111) {3}}: 600: 1. Qhov no anisotrostropic cov cuab yeej enables ntub dej etching kom paub meej tswj cov qauv morphology ntawm silicon wafers.
Crystal Orientation Ncaj Ncees nyob rau hauv qhuav etching
Qhuav etching (xws li plasma etching thiab tob rechaning ion ion ov ion ( Qhuav etching tsuas yog ua tiav cov khoom raug tshem tawm los ntawm kev sib txuas lub cev thiab tshuaj lom neeg ntawm cov kev qhia ua ke, yog li cov tshuaj lom neeg siv leitration yog qhov tseem ceeb tshaj plaws hauv kev tswj ntawm cov si tswj morphology.
Qhov tseem ceeb cuam tshuam rau Silicon etching tus nqi
Ntxiv nrog rau kev cob qhia crystal, Silicon etching tus nqi kuj tseem cuam tshuam los ntawm cov hauv qab no:
Qhov kub thiab txias: Ua kom sov kub feem ntau nrawm nrawm rau qhov kev tawm tsam, tab sis cov feem ntau ntawm etching cov nqi rau txhua lub tshuab siv lead ua tseem ruaj khov.
Etchant concentration: kev muaj ntau yam ntawm Ehel) tuaj yeem txhim kho anyotropy, thaum lub sij hawm qis yuav txo tau kev xaiv.
Doping concentration: Qhov etching tus nqi ntawm cov doped ntau (xws li p ++ hom) tuaj yeem txo qis, thiab txawm tias electrochemical nres tuaj yeem ua tiav.