Dab tsi yog cov kauj ruam hauv Kev Tsim Cov Silicon Wafers?

Kev tsim cov silicon wafers feem ntau muaj cov kauj ruam hauv qab no:
1) Crystal kev loj hlob, uas tuaj yeem muab faib ua Czochralski method (CZ) thiab zone melting method (FZ). Txij li cov khoom siv molten polycrystalline yuav ncaj qha mus rau quartz crucible, cov impurities nyob rau hauv lub quartz crucible yuav paug cov molten polycrystal. Txoj kev Czochralski ncaj nraim rau tib lub Crystalline carbon thiab cov ntsiab lus oxygen yog qhov siab, thiab muaj ntau yam impurities thiab tsis xws luag, tab sis tus nqi qis, thiab nws yog tsim rau kos duab loj-inch (300mm) silicon wafers. Tam sim no nws yog lub ntsiab semiconductor silicon wafer khoom. Cov khoom siv lead ua ib leeg kos los ntawm cheeb tsam melting txoj kev muaj ob peb qhov tsis xws luag thiab cov pa roj carbon tsawg thiab cov pa oxygen vim tias cov khoom siv polycrystalline tsis nyob rau hauv kev sib cuag nrog cov quartz crucible, tab sis nws yog kim thiab kim, thiab yog haum rau high-power devices thiab ib co. cov khoom siv high-end.
2) Slicing, kos monocrystalline silicon pas nrig yuav tsum tau txiav tawm lub taub hau thiab tus Tsov tus tw cov khoom, ces yob thiab zom nws mus rau hauv txoj kab uas hla, txiav lub tiaj tiaj los yog V zawj, thiab ces txiav mus rau hauv nyias silicon wafers. Tam sim no, pob zeb diamond hlau txiav tshuab feem ntau yog siv, uas muaj kev ua haujlwm siab thiab zoo warpage thiab curvature ntawm silicon wafers. Ib qho me me ntawm cov duab tshwj xeeb yuav raug txiav nrog lub voj voog sab hauv.
3) Kev sib tsoo: Tom qab txiav, nws yog ib qho tsim nyog yuav tsum tshem tawm cov txheej puas ntawm qhov chaw txiav los ntawm kev sib tsoo kom ntseeg tau tias qhov zoo ntawm silicon wafer nto, txog 50um tshem tawm.
4) Corrosion: Corrosion yog txhawm rau tshem tawm cov txheej txheem puas tsuaj los ntawm kev txiav thiab sib tsoo, txhawm rau npaj rau txheej txheem polishing tom ntej. Corrosion feem ntau suav nrog alkali corrosion thiab acid corrosion. Tam sim no, vim muaj kev tiv thaiv ib puag ncig, feem ntau ntawm lawv siv alkali corrosion. Tus nqi ntawm kev tshem tawm corrosion yuav ncav cuag 30-40um, thiab qhov roughness saum npoo tuaj yeem ncav cuag qib micron.
5) Polishing: Polishing yog txheej txheem tseem ceeb hauv kev tsim cov silicon wafers. Polishing yog txhawm rau txhim kho qhov zoo ntawm qhov zoo ntawm silicon wafers los ntawm CMP (Chemical Mechanical Polished) thev naus laus zis kom ua tau raws li qhov yuav tsum tau ua rau kev tsim cov nti. Qhov saum npoo roughness tom qab polishing feem ntau yog Ra<5A.
6) Kev tu thiab ntim khoom: Raws li txoj kab dav ntawm kev sib xyaw ua ke tau txais me me thiab me, qhov yuav tsum tau ua kom zoo dua qhov ntsuas particle loj kuj tau nce siab dua. Kev ntxuav thiab ntim khoom kuj yog ib qho tseem ceeb hauv kev tsim cov silicon wafers. Megasonic tu tuaj yeem ntxuav thiab ua raws li silicon Feem ntau ntawm cov khoom saum toj no 0.3um ntawm qhov chaw ntawm silicon wafer yog lub tshuab nqus tsev kaw thiab ntim rau hauv lub thawv tsis huv los yog ntim nrog cov roj inert, kom cov Kev huv ntawm silicon wafer nto ua tau raws li qhov yuav tsum tau muaj ntawm kev sib xyaw ua ke.