Silicon wafers yog tsim los ntawm ib qho siv lead ua ntawm silicon ntshiab heev, feem ntau nrog tsawg dua ib feem ntawm cov kab mob. Cov txheej txheem Czochralski yog cov txheej txheem ntau tshaj plaws ntawm kev tsim cov pob zeb loj ntawm qhov purity no, uas cuam tshuam nrog rub cov noob siv lead ua los ntawm molten silicon, feem ntau hu ua yaj. Cov noob siv lead ua ces tsim rau hauv ib lub cylindrical ingot hu ua boule.
Cov ntsiab lus xws li boron thiab phosphorus tuaj yeem muab ntxiv rau hauv cov pob zeb hauv qhov tseeb kom tswj tau lub wafer cov khoom hluav taws xob, feem ntau yog rau lub hom phiaj ua kom nws ua n-hom lossis p-hom semiconductor. Lub boule yog txiav mus rau hauv nyias slices nrog ib tug hlau saw tseem hu ua wafer saw. Cov wafers txiav tuaj yeem polished rau ntau qib.
Dab tsi yog Silicon Wafer siv rau?
Lub silicon wafer yog ib daim nyias nyias ntawm crystalline silicon feem ntau siv hauv kev lag luam hluav taws xob. Silicon yog siv rau lub hom phiaj no vim nws yog ib tug semiconductor, txhais tau tias nws tsis yog ib tug muaj zog conductor los yog muaj zog insulator ntawm hluav taws xob. Nws txoj kev nplua nuj thiab lwm yam khoom feem ntau ua rau silicon nyiam rau lwm cov khoom siv hluav taws xob xws li germanium rau kev ua wafers.
Qhov loj tshaj plaws ntawm silicon wafers nyob ntawm lawv daim ntawv thov. Cov wafers siv nyob rau hauv ICs yog puag ncig nrog diameters feem ntau ntawm 100 mus rau 300 millimeters (mm). Qhov tuab feem ntau nce nrog txoj kab uas hla thiab feem ntau yog nyob rau hauv thaj tsam ntawm 525 txog 775 microns (μm). Cov wafers nyob rau hauv lub hnub ci hlwb feem ntau yog square nrog ob sab ntsuas 100 mus rau 200 mm. Lawv cov tuab yog nyob nruab nrab ntawm 200 thiab 300 μm, txawm hais tias qhov no yuav tsum tau ua qauv rau 160 μm yav tom ntej.
Integrated Circuits
Ib qho IC, tseem hu ua microchip lossis tsuas yog nti, yog ib txheej ntawm cov hluav taws xob hluav taws xob teeb tsa rau hauv cov khoom siv hluav taws xob semiconducting. Monocrystalline silicon yog tam sim no feem ntau cov substrate rau ICs, txawm hais tias gallium arsenide yog siv nyob rau hauv ib co kev siv xws li wireless kev sib txuas lus. Wafers ua los ntawm silicon-germanium alloys kuj tau siv dav dua, feem ntau hauv cov ntawv thov uas qhov nrawm dua ntawm silicon-germanium tsim nyog tus nqi siab dua.
ICs tam sim no siv nyob rau hauv cov khoom siv hluav taws xob feem ntau, tau hloov pauv cov khoom siv hluav taws xob sib cais. Lawv me me, sai dua thiab pheej yig dua los tsim dua cov khoom sib cais los ntawm kev txiav txim ntawm qhov loj. Kev txais yuav sai sai ntawm ICs hauv kev lag luam hluav taws xob kuj yog vim qhov tsim qauv ntawm ICs, uas yooj yim qiv nws tus kheej rau ntau lawm.
Cov khaubncaws sab nraud povtseg no tau tsim zoo ib yam li cov duab tsis tu ncua tshwj tsis yog tias lub teeb ultraviolet yog siv ntau dua li qhov pom lub teeb vim tias lub wavelengths ntawm pom lub teeb loj dhau los tsim cov yam ntxwv nrog qhov tsim nyog precision. Cov yam ntxwv ntawm ICs niaj hnub no me me uas cov txheej txheem engineers yuav tsum siv electron microscopes los debug lawv.
IC Fabrication
Cov khoom siv ntsuas hluav taws xob (ATE) ntsuas txhua lub wafer ua ntej siv los ua IC, txheej txheem, feem ntau hu ua wafer probing lossis wafer kuaj. Lub wafer yog txiav mus rau hauv daim duab plaub lub npe hu ua tuag thiab tom qab ntawd txuas nrog lub pob hluav taws xob ntawm cov khoom siv hluav taws xob, uas feem ntau yog ua los ntawm kub lossis txhuas. Cov xov hlau no tau txuas nrog cov ntaub qhwv uas feem ntau nyob ib ncig ntawm ntug ntawm qhov tuag siv ultrasound hauv cov txheej txheem hu ua thermosonic bonding.
Cov khoom siv tau dhau los ua qhov kev sim zaum kawg, uas feem ntau siv ATE thiab cov khoom siv suav tomography (CT) scanning. Tus nqi txheeb ze ntawm kev sim nws txawv heev raws li cov txiaj ntsig, qhov loj thiab tus nqi ntawm cov cuab yeej. Piv txwv li, kev ntsuam xyuas yuav suav txog ntau dua 25% ntawm tag nrho cov khoom tsim cov nqi pheej yig, tab sis nws tuaj yeem ua tsis zoo rau cov khoom siv loj, kim nrog cov txiaj ntsig qis.
Cov txheej txheem
Kev tsim ntawm ICs yog txheej txheem ua haujlwm siab heev uas siv ntau cov txheej txheem tshwj xeeb. Cov peev txheej no ua rau tus nqi siab ntawm kev tsim cov chaw tsim khoom, uas tuaj yeem tshaj $ 8 nphom raws li xyoo 2016. Tus nqi no yuav tsum nce ntau sai dua li kev nce nqi vim qhov kev xav tau ntxiv rau kev siv tshuab ntau dua.
Cov qauv ntawm cov transistors me me yuav txuas ntxiv mus rau lub neej yav tom ntej, nrog 14 nm yog lub xeev ntawm kev kos duab hauv xyoo 2016. IC cov tuam txhab xws li Intel, Samsung, Ntiaj Teb Foundries thiab TSMC xav tias yuav pib hloov mus rau 10 nm transistors thaum kawg ntawm 2017. .
Cov wafers loj muab kev lag luam ntawm cov nplai, uas txo cov nqi tag nrho ntawm ICs. Qhov loj tshaj plaws wafers uas muaj nyob rau hauv lub lag luam yog 300 hli nyob rau hauv lub cheeb, nrog rau 450 hli yuav tsum yog qhov loj tshaj plaws tom ntej no. Txawm li cas los xij, cov kev sib tw tseem ceeb tseem muaj nyob rau kev ua wafers ntawm qhov loj no.
Cov txheej txheem ntxiv siv hauv kev tsim cov ICs suav nrog tri-gate transistors, uas Intel tau tsim nrog qhov dav ntawm 22 nm txij li xyoo 2011. IBM siv cov txheej txheem hu ua strained silicon ncaj qha rau ntawm insulator (SSDOI), uas tshem tawm cov silicon-germanium txheej los ntawm ib wafer.
Copper yog hloov txhuas interconnects hauv ICs, feem ntau vim nws cov hluav taws xob ntau dua. Low-K dielectric insulators thiab Silicon on Insulators (SOIs) kuj yog cov txheej txheem tsim khoom siab heev rau ICs.
Lwm cov peev txheej hais txog Semiconductors
Basic Wafer Terms & Definitions
Txiav Si Wafers Off-Axis
Oxygen Precipitation hauv Silicon
Cov khoom ntawm iav raws li muaj feem xyuam rau kev siv nrog Silicon
Daim ntawv qhia rau SEMI Specifications rau Si Wafers
ntub-tshuaj lom Etching thiab ntxuav ntawm Silicon
Solar Cells
Lub hnub ci cell siv cov nyhuv photovoltaic los hloov lub teeb lub zog rau hauv lub zog hluav taws xob, uas feem ntau cuam tshuam nrog kev nqus ntawm lub teeb los ntawm qee yam khoom los ua kom cov hluav taws xob ua rau lub zog siab dua. Nws yog hom photoelectric cell, ib yam khoom uas hloov nws cov yam ntxwv hluav taws xob thaum raug lub teeb. Hnub ci hlwb tuaj yeem siv lub teeb los ntawm txhua qhov chaw, txawm tias lo lus "hnub ci" txhais tau tias lawv xav tau lub hnub ci.
Kev tsim hluav taws xob ua lub zog siv hluav taws xob yog ib qho kev paub zoo tshaj plaws rau cov hnub ci hlwb. Cov hom hnub ci no siv lub teeb ci los them lub roj teeb, uas tuaj yeem siv los ua hluav taws xob hluav taws xob.
Lub hnub ci hlwb feem ntau tau muab tso rau hauv cov cuab yeej uas lawv xav kom muaj zog. Piv txwv li, lub hnub ci hluav taws xob lub teeb uas muaj nyob rau hauv cov khw muag khoom txhim kho hauv tsev siv lub hnub ci los them lub roj teeb thaum nruab hnub. Thaum tsaus ntuj, lub roj teeb powers lub suab sensor uas tig lub teeb thaum nws pom kev txav.
Cov hnub ci hnub ci tuaj yeem muab faib ua thawj, thib ob thiab thib peb tiam. Thawj tiam cell yog tsim los ntawm crystalline silicon, nrog rau monocrystalline silicon thiab polysilicon. Lawv tam sim no feem ntau hom hnub ci cell. Cov hlwb thib ob siv cov yeeb yaj kiab nyias muaj li ntawm amorphous silicon thiab feem ntau yog siv hauv cov chaw lag luam hluav taws xob. Peb tiam solar cells siv nyias zaj duab xis tsim nrog ntau yam kev siv thev naus laus zis tshiab thiab tam sim no muaj kev txwv kev lag luam.
Solar Cell Fabrication
Feem ntau ntawm cov thawj tiam hnub ci cell yog tsim los ntawm crystalline silicon, txawm hais tias nws cov qauv zoo thiab purity nyob deb hauv qab uas siv hauv ICs. Monocrystalline silicon hloov lub teeb rau hauv hluav taws xob zoo dua li polysilicon, tab sis monocrystalline silicon tseem kim dua.
Cov wafers raug txiav rau hauv cov squares los tsim ib tus neeg lub hlwb, thiab lawv cov ces kaum raug txiav los ua octagons. Cov duab no muab lub hnub ci vaj huam sib luag lawv cov pob zeb diamond zoo li zoo li. Cov hlwb uas tsim ib lub hnub ci vaj huam sib luag yuav tsum tau taw qhia nyob rau tib lub dav hlau kom ua kom muaj txiaj ntsig zoo tshaj plaws. Cov vaj huam sib luag feem ntau yog them nrog ib daim iav ntawm sab uas ntsib lub hnub los tiv thaiv cov wafers.
Cov hnub ci hnub ci tuaj yeem txuas nrog hauv cov koob lossis sib npaug, nyob ntawm qhov xav tau tshwj xeeb. Kev sib txuas ntawm cov hlwb hauv cov koob ua rau lawv qhov hluav taws xob nce ntxiv thaum txuas lawv nyob rau hauv parallel nce qhov tam sim no. Thawj qhov tsis zoo ntawm cov hlua sib txuas yog qhov cuam tshuam ntawm cov duab ntxoov ntxoo tuaj yeem ua rau cov hlua duab ntxoov ntxoo kaw, uas tuaj yeem ua rau cov hlua teeb pom kev zoo siv qhov rov qab tsis zoo rau cov hlua duab ntxoov ntxoo. Cov nyhuv no tuaj yeem ua rau poob ntau lub zog thiab txawm tias puas rau cov hlwb.
Qhov kev daws teeb meem zoo tshaj plaws rau qhov teeb meem no yog txhawm rau txuas cov hlua ntawm cov xov tooj hauv series los tsim cov qauv thiab siv qhov siab tshaj plaws lub zog taw tes trackers (MPPTs) los tswj lub zog xav tau ntawm cov hlua ntawm nws tus kheej ntawm ib leeg. Txawm li cas los xij, cov modules kuj tuaj yeem sib cuam tshuam los tsim ib qho array nrog rau qhov xav tau tam sim no thiab qhov siab tshaj plaws. Lwm qhov kev daws teeb meem tshwm sim los ntawm kev cuam tshuam duab ntxoov ntxoo yog kev siv shunt diodes kom txo tau lub zog poob.
Loj nce
Qhov sib txawv ntawm cov boules loj hauv kev lag luam semiconductor tau ua rau muaj qhov loj ntawm lub hnub ci. Lub hnub ci vaj huam sib luag tsim nyob rau xyoo 1980 yog ua los ntawm cov hlwb nrog txoj kab uas hla ntawm 50 thiab 100 hli. Panels ua thaum xyoo 1990 thiab 2000s feem ntau siv wafers nrog txoj kab uas hla ntawm 125 mm, thiab panels ua txij li xyoo 2008 muaj 156 hli hlwb.
Kev siv Silicon Wafers
Silicon wafers feem ntau yog siv los ua lub substrate rau kev sib xyaw ua ke (ICs), txawm hais tias lawv tseem yog cov khoom tseem ceeb hauv photovoltaic, lossis hnub ci, hlwb. Cov txheej txheem yooj yim ntawm kev tsim cov wafers yog tib yam rau ob qho tib si ntawm cov ntawv thov no, txawm hais tias qhov kev xav tau zoo dua rau cov wafers siv hauv ICs. Cov wafers no kuj tau txais cov kauj ruam ntxiv xws li ion implantation, etching thiab photolithographic qauv, uas tsis xav tau rau lub hnub ci hlwb.